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Plane Grating Spectrometer PGS
NIR
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In addition to the proven
MCS (Multi Channel Spectrometer) and the MMS (Monolithic Miniature
Spectrometer) modules with Si photodiode array detectors or
CCD detectors, Carl Zeiss is now devoting its attention to a
new generation of InGaAs diode array spectrometers for the near
infrared (NIR).
The outstanding feature of the modules is their special combination
of collimator and focusing lens with a plane grating. Like the
MMS and MCS modules, all parts are permanently adhered together
and are hence thermally stable, very robust and compact. They
offer excellent wavelength stability and superb wavelength accuracy.
The PGS modules can be used for all applications in the NIR
region. Due to their high resolution, they are of interest for
layer thickness measurements on thick layers in the field of
semiconductors. A further benefit of the new plane grating spectrometers
for the NIR region is their good price/performance ratio.
The PGS 1.7 is used for the wavelength range from 960 nm to 1690
nm. The diode array have 512 pixels and because of this the
resolution of the spectrometer is 5 nm.
The PGS 2.0 is used for the wavelength range from 1340 nm to 2000 nm.
The diode array have 256 pixels and because of this the resolution of the spectrometer is 6 nm.
The PGS 2.2 is used for the wavelength range from 1000 nm to 2170 nm.
The diode array have 256 pixels and because of this the resolution of the spectrometer is 16 nm.
• The PGS have the following benefits for you:
• Use for diverse measuring tasks in the NIR range
• Compact, permanently aligned
• Robust and thermally stable
• Excellent wavelength stability and wavelength accuracy
• High resolution
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